Custom chrome on quartz glass (fused silica) test&calibration targets: For backlight illumination/ transmission illumination applications
Accuracy Description
Feature size Accuracy: Dot Diameter, Square/Checker Size, Line Width, etc	±0.001mm / ±0.0001mm	Circularity (Example ➡Go Link)	0.001mm
		Line Straightness (mm)	0.001mm
Feature Spacing Accuracy of Any 2 Neighbor Features: Dot Spacing, Chessgrid Corner to Corner Spacing, Line Spacing, etc (Accuracy Definition ➡Go Link)		Dimension <= 100mm: 0.001mm
		Dimension 100~200mm: 0.001mm
		Dimension 200~300mm: 0.001mm
		Dimension 300~400mm: 0.002mm
		Dimension 400~500mm: 0.002mm
		Dimension 500~600mm: 0.003mm
Feature Position Accuracy among Entire Pattern Area (Regarding to Ideal Position)--ChessGrid Corner Position, Circle Position, etc (Accuracy Definition ➡Go Link)		Dimension <= 100mm: 0.002mm
		Dimension 100~200mm: 0.002mm
		Dimension 200~300mm: 0.002mm
		Dimension 300~400mm: 0.004mm
		Dimension 400~500mm: 0.004mm
		Dimension 500~600mm: 0.006mm
Accuray of Distance from Chrome Pattern to Target Edge		±0.05mm, ±0.1mm
3rd Party Certificate of Accuracy ／ Internal Certificate of Accuracy		Available on request (➡Example Link)
Resolution Performance
Minimum feature size
Smallest Dot diameter, Dot spacing, Checker size, Line width, Line spacing, etc		Down to 0.5um
Production Process
Lithography
Geometry Dimension and Tolerance
Length / Width (mm)	from 1x1mm  to 1200 x 850mm	Thickness (mm)	1.5 / 2.3 / 3.0 / 10.0mm for options
Dimension Tolerance (mm)	±0.05mm, ±0.1mm	Thickness Tolerance (mm)	±0.1mm
Edges	Beveled	Angle of the edges	±1°
Surface Roughness	<0.025um	Surface Flatness (um)	Dimension <130mm: ~5um;
			Dimension 130-220mm: ~10um;
			Dimension 220-450mm: ~20um;
			Dimension 450-550mm: ~30um;
Coating Description
Standard Chrome Type--- Dark Brown Chrome ● Color: Color: First surface / Air side Dark Brown, glass side SILVER; ● First surface Reflectivity < 25%@550nm; ● OD (Optical Density) >3.0;	First surface/ Air side Brown (Front view) Glass side Silver (Back view)	Custom Chrome Type--- Blue Chrome-SILVER ●  Color: First surface / Air side BLUE, glass side SILVER; ●  First surface Reflectivity < 5% @680nm; ●  OD (Optical Density) >5.0;	First surface/ Air side Blue (Front view) Glass side Silver (Back view)
Custom Chrome Type--- Blue Chrome-BLUE ●  Color: First surface / Air side BLUE, glass side BLUE; ●  First surface Reflectivity < 5% @680nm; ●  OD (Optical Density) >5.0;	First surface/ Air side Blue (Front view) Glass side Blue (Back view)	Custom Chrome Type--- High Reflective Chrome (SILVER) ●  Color: First surface / Air side SILVER, glass side SILVER; ●  First surface Reflectivity < 65% @436nm; ●  OD (Optical Density) >3.0;	First surface/ Air side Silver (Front view) Glass side Silver (Back view)
Chrome Reflectance Comparison
AR Coating	● AR Coating on appointed side of target/reticle; ● AR Coating on both sides of target/reticle; ● VAR: single AR coating with custom bandwidth, e.g. 850nm, 940nm; ● BBAR: broadband AR coating, e.g. VIS (420-700nm); ● Reflectance data over wavelength after AR coating are on request (measuring tolerance <+/-0.03%); ● Transmittance data over wavelength after AR coating are on request (measuring tolerance <+/-0.01%);
Protection layer (Pellicle) above the chrome layer making the chrome pattern more durable		On request
Substrate Properties
Chrome pattern made on soda lime glass substrate is chemically and dimensionally stable, and reasonably rigid;
Reflectance (420~700nm)	Rave<3.643%@420~700nm (Reflectance can be optimized to Rave<0.3% by applying AR coating on glass surface if needed)	Transmittance (420~700nm)	Tmax <93.709%@420~700nm (Transmittance can be optimized to Tmax<99.2% by applying AR coating on glass surface if needed)
Refractive index	1.4701@400nm; 1.4585@587nm; 1.4553@700nm;	Surface Quality	Scratch:Dig<=40:20
Coefficient of Thermal Expansion (CTE)  (15 to 200 ℃)	<5.0*10⁻⁷	Manufacturing Temperature（°C）	23°C
Compressive Strength	1100Mpa	Bending Strength / Flexural Strength	67Mpa
Tensile Strength	48Mpa	Poisson's Ratio	0.14-0.17
Young Modulus	72000Mpa	Modulus of rigidity	31000Mpa
Moh's hardness	7	Highest use temperature	1100℃
Dielectric Constant	3.7-3.9MHz	Coefficient of Thermal conductivity（°C）	1.47/m°C
Thermal Expansion of Substrate
		Soda Lime Glass (Float Glass)	Quartz Glass (Fused Silica)
Coefficient of Thermal Expansion (CTE) (15 to 200 ℃)		85X10-7 / ℃	<5.5*10⁻⁷
Expansion  In Terms of 1 Meter		8.5μm/℃	0.55μm/℃
Prons and Cons
Advantage	Low Thermal Expansion Rate (CTE): <5.0*10⁻⁷	Disadvantage	If nice thermal expansion performance is not essential, quatz glass is not recommended because of higher cost compared with soda lime glass/float glass
Customization Details
Custom Pattern	Custom Pattern as customer's own design can be fully realized as long as the smallest feasture size is >=0.7um; e.g. dot grid, checkerboard array, line grid, Charcu grid, crosshair, etc Positive type (Opaque pattern on clear/transparent background) and Negative type (Clear/transparent pattern on opaque background) are flexible up to customer' option;
Custom Backlights for Chrome on Quartz Glass Targets / Reticles	Available on request (➡Go Link)
Custom Geometry Dimension	Length / Width (mm)	from 1x1mm to 1000 x 1000mm flexible
	Thickness (mm)	1.5 / 2.3 / 3.0 / 5.0mm for options
	Irregular shapes are on request
	Mounting / Assembling Holes, Angles, Corners, Protective Chamfers on the calibration&test targets are on request
Custom work on the back side of substrate	White &smooth coating on the back side of Substrate	Available
Custom / Digitalize drawing	Dot Vision engineers could help you digitize the drawing. Data prep service is included in the targets / charts / reticles.
Custom Mechanical Protection/Mounting frames are on requrest
3rd Party Certification	Available

Custom Chrome Graticules, scales, reticles, pin holes, apertures, calibration targets, resolution targets, test targets and others in single pieces and small batches as well as in high-volume serial quantities are on request.

With guaranteed product quality, all calibration targets are tested using precision measurement instruments before packing and delivery to clients to ensure the accuracy.

Dot Vision can provide third party certificate of the accury from feature to feature for the customization product if you require. You can name and require  any feature/position which you want accuracy certification from third party.

Ø OMM machine used: Hexagon OMM machine with uncertainty Exy= ±(0.6+L/900) um  (Laboratory temerature 20℃, humidity 49%)

Ø OMM measuring 3rd party is accredited in accordance with ISO/IEC 17025:2005 General Requirement for the competence of Testing and Calibration Laboratories

Go Link:

Accuracy performance analysis of a chrome on glass dot grid calibration target

Dot Vision use direct write lithography technology to make chrome pattern / chrome mask layer above transparent soda lime glass (float glass) and opaque ceramic substrate to ensure high accuracy.

• 1. Minimum feature size: Down to 0.7 μm

• 2. Address grid: Down to 12.5 nm

• 3. Exchangeable write modes

• 4. Real-time autofocus system

• 5. High power DPSS laser with 355 nm wavelength

• 6. Camera system for metrology and alignment

• 7. Closed-loop climate chamber

• 8. Edge detector system

Holes/ angles/ corners on the calibration target are available 

Irregular shapes of calibration target are available

• How about customization?

  We are always happy and patient to hear your own ideas about the design of a customised calibration target, MOQ is 1pcs.

• How can I make payment?

  Paypal, credit card, or bank transfer are all available. 

• How does Dot Vision make delivery to you?

  Dot Vision use DHL/Fedex/TNT/UPS to make the delivery to international customers from worldwide, no matter you are from Asia, America, or Europe. Normally you can receive package within 3 days, fastest service is in 2 days.

• Where does Dot Vision serve and support?

  Dot Vision directly serves and supports international customers from worldwide, Asia, America, Europe.

• Is there initial setup cost for customization?

  Dot Vision makes any customization pattern without extra initial setup cost, besides, Dot Vision offers to design the drawing for you without charge which is within our service.

• How can I get in touch with Dot Vision immediately?

  You can get in contact with us quickly from the yellow buttoms "Inquiry Now", "Ask Question", "Customization", you can also send us an e-mail via info@dot-vision.com, our engineer will get back to you immediately within 24 hours.

• How to get customization/ what's the customization procedure?

  1. Selecting the suitable substrate material is the first but also important step in customization, you can refer to this webpage  Select right substrate material to select suitable material, or you are always welcome to discuss with us to select suitable material via  info@dot-vision.com, Dot Vision engineer will come back to you immediately within 24 hours; 

  2. After selecting material, you can send us your drawing via  info@dot-vision.com(PDF, .dwg, .dxf, .jpg files are all fine), Dot Vision engineer will come back to you immediately within 24 hours; 

  if you don't have drawing, Dot Vision engineer could help to design the drawing;

  3. Dot Vision engineering team will make you quotation based on the material and your drawing; 

  4. After order entry, Dot Vision engineers will send you final manufacturing drawing for double confirmation before final manufacturing; 

  5. Customization manufacturing time is within 7 working days after final manufacturing drawing is confirmed;