Custom Chrome on Soda Lime Glass (Float Glass) Test&Calibration targets/charts/masks: For backlight illumination/ transmission illumination applications |
| Accuracy Description |
| Feature size Accuracy: Dot Diameter, Square/Checker Size, Line Width, etc | ±0.001mm | Circularity (Example ➡Go Link) | 0.001mm |
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| Line Straightness | 0.001mm |
| Feature Spacing Accuracy of Any 2 Neighbour Features: Dot Spacing, Chessgrid Corner to Corner Spacing, Line Spacing, etc (Accuracy Definition ➡Go Link) | ±0.001mm |
Feature Position Accuracy among Entire Pattern Area (Regarding to Ideal Position)--ChessGrid Corner Position, Circle Position, etc (Accuracy Definition ➡Go Link)
| Dimension <= 100mm: 0.001mm
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| Dimension 100~200mm: 0.002mm |
Dimension 200~300mm: 0.003mm
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| Dimension 300~400mm: 0.003mm |
| Dimension 400~500mm: 0.004mm |
| Dimension 500~600mm: 0.005mm |
| Feature Spacing Accuracy of Any 2 Neighbour Features: Dot Spacing, Chessgrid Corner to Corner Spacing, Line Spacing, etc (Accuracy Definition ➡Go Link) | Dimension <= 100mm: 0.002mm
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Dimension 100~200mm: 0.004mm
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| Dimension 200~300mm: 0.006mm |
| Dimension 300~400mm: 0.006mm |
| Dimension 400~500mm: 0.008mm |
| Dimension 500~600mm: 0.010mm |
| Accuray of Distance from Chrome Pattern to Target Edge | ±0.05mm, ±0.1mm |
| 3rd Party Certificate of Accuracy / Internal Certificate of Accuracy | Available on request (➡Example Link) |
| Resolution Performance |
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| Minimum Feature Size |
| Smallest Dot diameter, Dot spacing, Checker size, Line width, Line spacing, etc | Down to 2.0um (Smallest feature size 0.5~2.0um ➡ Go Link)
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| Production Process |
Lithography

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| Geometry Dimension and Tolerance |
| Length / Width | from 1x1mm to 1092 x 813mm | Thickness | 0.2mm / 0.55mm / 0.75mm/ 1.0mm / 1.5mm / 2.3mm / 3.0mm / 4.8mm / 7.8mm for options |
| Overall Dimension Tolerance | Dimension<127mm:±0.05mm | Thickness Tolerance | ±0.1mm |
| Dimension127mm~300mm:±0.1mm |
| Dimension>300mm:±0.2mm |
| Edges | Beveled | Angle of the edges
| ±1° |
| Surface Roughness | <0.025um | Surface Flatness (um) | Dimension <127mm: 5-10um |
| Dimension 150-200mm: 15-20um |
| Dimension 220-380mm: 30-50um |
| Dimension 400-550mm: 50-60um |
| Coating Description |
Standard Chrome Type--- Dark Brown Chrome ● Color: Color: First surface / Air side Dark Brown, glass side SILVER;
● First surface Reflectivity < 25%@550nm; ● OD (Optical Density) >3.0; | First surface/ Air side Brown (Front view) 
Glass side Silver (Back view) 
| Custom Chrome Type--- Blue Chrome-SILVER ● Color: First surface / Air side BLUE, glass side SILVER; ● First surface Reflectivity < 5% @680nm; ● OD (Optical Density) >5.0; | First surface/ Air side Blue (Front view) 
Glass side Silver (Back view) 
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Custom Chrome Type---
Blue Chrome-BLUE ● Color: First surface / Air side BLUE, glass side BLUE; ● First surface Reflectivity < 5% @680nm; ● OD (Optical Density) >5.0; | First surface/ Air side Blue (Front view) 
Glass side Blue (Back view) 
| Custom Chrome Type---
High Reflective Chrome (SILVER) ● Color: First surface / Air side SILVER, glass side SILVER; ● First surface Reflectivity < 65% @436nm; ● OD (Optical Density) >3.0; | First surface/ Air side Silver (Front view) 
Glass side Silver (Back view) 
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Chrome Reflectance Comparison 
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| AR Coating | ● AR Coating on appointed side of target/reticle; ● AR Coating on both sides of target/reticle; ● VAR: single AR coating with custom bandwidth, e.g. 850nm, 940nm; ● BBAR: broadband AR coating, e.g. VIS (420-700nm); ● Reflectance data over wavelength after AR coating are on request (measuring tolerance <+/-0.03%); ● Transmittance data over wavelength after AR coating are on request (measuring tolerance <+/-0.01%); 
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| Protection layer (Pellicle) above the chrome layer making the chrome pattern more durable | On request |
| Substrate Properties |
Chrome pattern made on soda lime glass substrate is chemically and dimensionally stable, and reasonably rigid;
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| Reflectance (420~700nm) | Rave<4.368%@420~700nm (Reflectance can be optimized to Rave<0.5% by applying AR coating on glass surface if needed)
| Transmittance (420~700nm) | Tmax <91.892%@420~700nm (Transmittance can be optimized to Tmax<99.2% by applying AR coating on glass surface if needed) |
| Refractive Index | 1.5373@400nm; 1.5234@587nm; 1.5195@700nm; | Surface Quality | Scratch:Dig<=40:20 |
| Thermal Expansion Coeff (CTE) (15 to 200 ℃) | <100X10-7 / ℃ | Manufacturing Temperature | 23℃ |
| Shear Modulus | <3000 kg/mm2 | Knoop Hardness | >500 kg/mm2 |
| Annealing Point | >530 ℃ | Density
| 2.4g/cm3 |
| Highest Use Temperature | 80℃ | Storage Temperature | 10-80℃ |
| Thermal Expansion Comparision |
| Soda Lime Glass (Float Glass) | Quartz Glass (Fused Silica) ➡ Go Link |
| Coefficient of Thermal Expansion (CTE) (15 to 200 ℃) | 85X10-7 / ℃ | 5.5*10⁻⁷ |
Expansion In Terms of 1 Meter
| 8.5μm/℃ | 0.55μm/℃ |
| Prons and Cons |
| Advantage | ● Highest accuracy compared with PET film, printing, UV ink/photosensitive ink developping;
● Integrated backlight illumination ensures a high uniformity among the entire surface, making the choice perfect for demanding applications; ● Integrated backlight illumination ensures the calibration target not sensitive against ambient light; | Disadvantage | ● Chrome option costs more than high resolution printing if +/- 1um feature position accuracy is not essential; ● Chrome on glass targets are mostly not suitable for front lighting; |
| Customization Options |
Custom Pattern | Custom Pattern as customer's own design can be fully realized as long as the smallest feasture size is >=0.7um; e.g. dot grid, checkerboard / chessboard array, line grid, Charcu grid, crosshair, etc Positive type (Opaque features on clear/transparent background) and Negative type (Clear/transparent features on opaque background) are flexible up to customer' option; |
| Custom Backlights for Chrome on Soda Lime Glass Targets / Reticles | Available on request (➡Go Link) |
| Custom Geometry Dimension | Length / Width (mm) | flexible from 1x1mm to 1092 x 813mm |
| Thickness (mm) | 0.55 / 0.75 / 1.0 / 1.6 / 2.3 / 3.0 / 4.8 / 7.8mm for options |
| Irregular/Custom shapes are on request |  |
| Mounting / Assembling Holes, Angles, Corners, Protective Chamfers on the calibration&test targets are on request |  |
| Custom work on the back side of substrate | White &smooth coating on the back side of Substrate | Available |
| Custom / Digitalize drawing | Dot Vision engineers offer service of digitizing the drawing. Data prep service is included in the targets / charts / reticles. |
| Custom Mechanical Protection / Mounting frames are on requrest | 
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