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Chrome on soda lime glass (float glass)
Description: Standard Feature size accuracy +/-1um;
Standard feature position accuracy within 1um;
Smallest line width/minimum feature size down to 2.0um;
Maximum size 1092x813mm;

Custom Chrome Graticules, scales, reticles, pin holes, apertures, calibration targets, resolution targets, test targets and others in single pieces, in small batch, as well as in high-volume serial quantities are on request.
Notes

1. Customization MOQ is 1pcs.

2. Dot Vision directly serves and supports international customers.

3. You can get in touch with our engineers quickly by clicking below Buttom "Inquiry now" "Ask Questions" "Customization"

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Custom Chrome on Soda Lime Glass (Float Glass) Test&Calibration targets/charts/masks: For backlight illumination/ transmission illumination applications

Accuracy Description
Feature size Accuracy: Dot Diameter, Square/Checker Size, Line Width, etc±0.001mm

Circularity

(Example Go Link)

0.001mm
chrome on glass--dot circularity.jpg
Line Straightness0.001mm
Feature Spacing Accuracy of Any 2 Neighbour Features: Dot Spacing, Chessgrid Corner to Corner Spacing, Line Spacing, etc (Accuracy Definition Go Link)±0.001mm
Feature Position Accuracy among Entire Pattern Area (Regarding to Ideal Position)--ChessGrid Corner Position, Circle Position, etc (Accuracy Definition Go Link)
Dimension <= 100mm: 0.001mm
Dimension 100~200mm: 0.002mm
Dimension 200~300mm: 0.003mm
Dimension 300~400mm: 0.003mm
Dimension 400~500mm: 0.004mm
Dimension 500~600mm: 0.005mm
Feature Spacing Accuracy of Any 2 Neighbour Features: Dot Spacing, Chessgrid Corner to Corner Spacing, Line Spacing, etc  (Accuracy Definition Go Link)Dimension <= 100mm: 0.002mm
Dimension 100~200mm: 0.004mm
Dimension 200~300mm: 0.006mm
Dimension 300~400mm: 0.006mm
Dimension 400~500mm: 0.008mm
Dimension 500~600mm: 0.010mm
Accuray of Distance from Chrome Pattern to Target Edge±0.05mm, ±0.1mm
3rd Party Certificate of Accuracy / Internal Certificate of AccuracyAvailable on request (Example Link)
Resolution Performance
resolution performance-dot grid edge profile-chrome on glass calibration target.pngresolution performance-chessgrid edge profile-chrome on glass calibration target.png
Minimum Feature Size
Smallest Dot diameter, Dot spacing, Checker size, Line width, Line spacing, etcDown to 2.0um (Smallest feature size 0.5~2.0um Go Link)
Production Process

Lithography


lithography chrome on glass calibration target production process.jpg

Geometry Dimension and Tolerance
Length / Widthfrom 1x1mm  to 1092 x 813mmThickness0.2mm / 0.55mm / 0.75mm/ 1.0mm / 1.5mm / 2.3mm / 3.0mm /  4.8mm / 7.8mm for options
Overall Dimension ToleranceDimension<127mm:±0.05mmThickness Tolerance±0.1mm
Dimension127mm~300mm:±0.1mm
Dimension>300mm:±0.2mm
Edges

Beveled

Angle of the edges
±1°
Surface Roughness<0.025umSurface Flatness (um)Dimension <127mm: 5-10um
Dimension 150-200mm: 15-20um
Dimension 220-380mm: 30-50um
Dimension 400-550mm: 50-60um
Coating Description

Standard Chrome Type---

Dark Brown Chrome

● Color: Color: First surface / Air side Dark Brown, glass side SILVER;

● First surface Reflectivity < 25%@550nm;

● OD (Optical Density) >3.0;

First surface/ Air side Brown (Front view)

chrome on glass calibration target--dark brown chrome coating on front side.jpg


Glass side Silver (Back view)

chrome on glass calibration target--silver chrome coating on backside.jpg

Custom Chrome Type---

Blue Chrome-SILVER

●  Color: First surface / Air side BLUE, glass side SILVER;

●  First surface Reflectivity < 5% @680nm;

●  OD (Optical Density) >5.0;

First surface/ Air side Blue (Front view)

chrome on glass calibration target--blue chrome coating on front side.jpg.jpg


Glass side Silver (Back view)

chrome on glass calibration target--silver coating on front side.jpg.jpg

Custom Chrome Type---

Blue Chrome-BLUE

●  Color: First surface / Air side BLUE, glass side BLUE;

●  First surface Reflectivity < 5% @680nm;

●  OD (Optical Density) >5.0;

First surface/ Air side Blue (Front view)

chrome on glass calibration target--blue chrome coating on front side.jpg


Glass side Blue (Back view)

chrome on glass calibration target--blue chrome coating on backside.jpg

Custom Chrome Type---

High Reflective Chrome (SILVER)

●  Color: First surface / Air side SILVER, glass side SILVER;

●  First surface Reflectivity < 65% @436nm;

●  OD (Optical Density) >3.0;

First surface/ Air side Silver (Front view)

chrome on glass calibration target--silver coating on front side.jpg.jpg


Glass side Silver (Back view)

chrome on glass calibration target--silver coating on front side.jpg.jpg


Chrome Reflectance Comparison

Reflectivity.jpg

AR Coating

● AR Coating on appointed side of target/reticle;

● AR Coating on both sides of target/reticle;

● VAR: single AR coating with custom bandwidth, e.g. 850nm, 940nm;

BBAR: broadband AR coating, e.g. VIS (420-700nm);

Reflectance data over wavelength after AR coating are on request (measuring tolerance <+/-0.03%);

● Transmittance data over wavelength after AR coating are on request (measuring tolerance <+/-0.01%);

custom chrome on glass calibration with AR coating.png

Protection layer (Pellicle) above the chrome layer making the chrome pattern more durableOn request
Substrate Properties
Chrome pattern made on soda lime glass substrate is chemically and dimensionally stable, and reasonably rigid;
Reflectance (420~700nm)

Rave<4.368%@420~700nm (Reflectance can be optimized to Rave<0.5% by applying AR coating on glass surface if needed)

Transmittance (420~700nm)Tmax <91.892%@420~700nm (Transmittance can be optimized to Tmax<99.2% by applying AR coating on glass surface if needed)
Refractive Index

1.5373@400nm;

1.5234@587nm;

1.5195@700nm;

Surface Quality Scratch:Dig<=40:20 
Thermal Expansion Coeff (CTE)  (15 to 200 ℃)

<100X10-7 / ℃

Manufacturing Temperature 23℃
Shear Modulus<3000 kg/mm2Knoop Hardness>500 kg/mm2
Annealing Point>530 ℃Density
2.4g/cm3
Highest Use Temperature80Storage Temperature10-80
Thermal Expansion Comparision

Soda Lime Glass (Float Glass)Quartz Glass (Fused Silica) ➡ Go Link
Coefficient of Thermal Expansion (CTE) (15 to 200 ℃)85X10-7 / ℃5.5*10⁻⁷
Expansion  In Terms of 1 Meter
8.5μm/℃0.55μm/℃
Prons and Cons
Advantage

● Highest accuracy compared with PET film, printing, UV ink/photosensitive ink developping; 

Integrated backlight illumination ensures a high uniformity among the entire surface, making the choice perfect for demanding applications;

● Integrated backlight illumination ensures the calibration target not sensitive against ambient light;

Disadvantage

● Chrome option costs more than high resolution printing if +/- 1um feature position accuracy is not essential;

● Chrome on glass targets are mostly not suitable for front lighting;

Customization Options

Custom Pattern

Custom Pattern as customer's own design can be fully realized as long as the smallest feasture size is >=0.7um; e.g. dot grid, checkerboard / chessboard array, line grid, Charcu grid, crosshair, etc

Positive type (Opaque features on clear/transparent background) and Negative type (Clear/transparent features on opaque background) are flexible up to customer' option;

Custom Backlights for Chrome on Soda Lime Glass Targets / Reticlescustom backlight for chrome on glass calibration taget.jpg Available on request (Go Link)
Custom Geometry DimensionLength / Width (mm)flexible from 1x1mm to 1092 x 813mm
Thickness (mm)0.55 / 0.75 / 1.0 / 1.6 / 2.3 / 3.0 / 4.8 / 7.8mm for options
Irregular/Custom shapes are on requestirregular shape customization calibration target.jpg
Mounting / Assembling Holes, Angles, Corners, Protective Chamfers on the calibration&test targets are on requestcustomization.jpg
Custom work on the back side of substrateWhite &smooth coating on the back side of SubstrateAvailable
Custom / Digitalize drawing 

Dot Vision engineers offer service of digitizing the drawing. Data prep service is included in the targets / charts / reticles.

Custom Mechanical Protection / Mounting frames are on requrest custom chrome on ceramic target.jpg


Custom Chrome Graticules, scales, reticles, pin holes, apertures, calibration targets, resolution targets, test targets and others in single pieces and small batches as well as in high-volume serial quantities are on request.





With guaranteed product quality, all calibration targets are tested using precision measurement instruments before packing and delivery to clients to ensure the accuracy.


Dot Vision can provide third party certificate of the accury from feature to feature for the customization product if you require. You can name and require  any feature/position which you want accuracy certification from third party.


Ø OMM machine used: Hexagon OMM machine with uncertainty Exy= ±(0.6+L/900) um  (Laboratory temerature 20℃, humidity 49%)

Ø OMM measuring 3rd party is accredited in accordance with ISO/IEC 17025:2005 General Requirement for the competence of Testing and Calibration Laboratories

Go Link:

Accuracy performance analysis of a chrome on glass dot grid calibration target



Dot Vision use direct write lithography technology to make chrome pattern / chrome mask layer above transparent soda lime glass (float glass) and opaque ceramic substrate to ensure high accuracy.


  • 1. Minimum feature size: Down to 0.7 μm

  • 2. Address grid: Down to 12.5 nm

  • 3. Exchangeable write modes

  • 4. Real-time autofocus system

  • 5. High power DPSS laser with 355 nm wavelength

  • 6. Camera system for metrology and alignment

  • 7. Closed-loop climate chamber

  • 8. Edge detector system


图例.jpg


Holes/ angles/ corners on the calibration target are available

5.jpg  16.jpg  37.jpg


Irregular shapes of calibration target are available

20.jpg  22.jpg  26.jpg

28.jpg  29.jpg  35.jpg

Coating Types

High Reflective Chrome (Silver): 

Reflectivity<65% @436nm

Low Reflective Chrome (Dark Brown): 

Reflectivity<25% @550nm

Blue Chrome (Blue):  

Reflectivity<5% @632nm 

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22.jpg


56.jpg


Reflectivity.jpg


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18.jpg  35.jpg  43.jpg


20.jpg  22.jpg  28.jpg


26.jpg  29.jpg  30.jpg


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  • How about customization?

    We are always happy and patient to hear your own ideas about the design of a customised calibration target, MOQ is 1pcs.

  • How can I make payment?

    Paypal, credit card, or bank transfer are all available. 

  • How does Dot Vision make delivery to you?

    Dot Vision use DHL/Fedex/TNT/UPS to make the delivery to international customers from worldwide, no matter you are from Asia, America, or Europe. Normally you can receive package within 3 days, fastest service is in 2 days.

  • Where does Dot Vision serve and support?

    Dot Vision directly serves and supports international customers from worldwide, Asia, America, Europe.

  • Is there initial setup cost for customization?

    Dot Vision makes any customization pattern without extra initial setup cost, besides, Dot Vision offers to design the drawing for you without charge which is within our service.

  • How can I get in touch with Dot Vision immediately?

    You can get in contact with us quickly from the yellow buttoms "Inquiry Now", "Ask Question", "Customization", you can also send us an e-mail via info@dot-vision.com, our engineer will get back to you immediately within 24 hours.

  • How to get customization/ what's the customization procedure?

    1. Selecting the suitable substrate material is the first but also important step in customization, you can refer to this webpage  Select right substrate material to select suitable material, or you are always welcome to discuss with us to select suitable material via  info@dot-vision.com, Dot Vision engineer will come back to you immediately within 24 hours; 

    2. After selecting material, you can send us your drawing via  info@dot-vision.com(PDF, .dwg, .dxf, .jpg files are all fine), Dot Vision engineer will come back to you immediately within 24 hours; 

    if you don't have drawing, Dot Vision engineer could help to design the drawing;

    3. Dot Vision engineering team will make you quotation based on the material and your drawing; 

    4. After order entry, Dot Vision engineers will send you final manufacturing drawing for double confirmation before final manufacturing; 

    5. Customization manufacturing time is within 7 working days after final manufacturing drawing is confirmed;