Selecting the right substrate material and proper manufacturing process are the basic but most important steps to customize a calibration target.
¡ñ STEP 01: the operating environment (transmission, reflective or natural illumination) is essential to select either transparent or opaque material. Transparent material is for example soda lime glass, quartz glass, acryl or film. For reflective illumination/ natural illumination applications opaque material such as matte ceramic, aluminum and carbon fiber boards are your options.
¡ñ STEP 02: the required accuracy is the important parameter when selecting the manufacturing process. The feature size accuracy of Photosensitive ink pattern as an example is +/-10um while the accuracy of Chrome pattern from Direct Laser Writing lithography process is +/-1um, +/-0.1um; Besides accuracy, the smallest line width or minimum feature size is also a critical parameter. The limitation of Chrome pattern from Direct Laser Writing lithography process is 0.5um while Photosensitive ink exposuring process allows feature sizes down to 0.08mm.
| Min. Feature Size | 2um | 0.5um | 60um | 0.5um | 15um | 60um | 60um | 60um 15um |
| Feature size Accuracy, e.g. Dot Diameter, Checker Size | ¡À1um | ¡À1um, ¡À0.1um, ¡À0.05um | ¡À10um | ¡À1um, ¡À0.1um, ¡À0.05um | ¡À3um | ¡À20um | ¡À20um | ¡À20um ¡À5um |
| Feature Spacing Accuracy of Any 2 Neghbour Features (Accuracy Definition ➡Go Link) | ¡À1um | ¡À1um, ¡À0.1um, ¡À0.05um | ¡À10um | ¡À1um, ¡À0.1um, ¡À0.05um | ¡À2um | ¡À10um | ¡À10um | ¡À10um ¡À2um |
| Feature Position Accuracy among Entire Pattern Area (Regarding to Ideal Position, Accuracy Definition ➡Go Link) | Pattern area <=100mm: 1um | Pattern area <=100mm: 1um | Pattern area <=100mm: 10um | Pattern area <=100mm: 1um | Pattern area <=50mm: 2um | Pattern area <=100mm: 10um | Pattern area <=100mm: 10um | Pattern area Pattern area |
| Pattern area 100~200mm: 2um | Pattern area 100~200mm: 1um | Pattern area 100~200mm: 20um | Pattern area 100~200mm: 2um | Pattern area 50~100mm: 3um | Pattern area 100~200mm: 20um | Pattern area 100~200mm: 20um | Pattern area 100~200mm: Pattern area 100~200mm: | |
| Pattern area 200~300mm: 3um | Pattern area 200~300mm: 1um | Pattern area 200~300mm: 30um | Pattern area 200~300mm: 3um | Pattern area 100~150mm: 4um | Pattern area 200~300mm: 30um | Pattern area 200~300mm: 30um | Pattern area 200~300mm: Pattern area 200~300mm: | |
| Pattern area 300~400mm: 3um | Pattern area 300~400mm: 2um | Pattern area 300~400mm: 40um | Pattern area 300~400mm: 3um | Pattern area 150~228mm: 5um | Pattern area 300~400mm: 40um | Pattern area 300~400mm: 40um | Pattern area 300~400mm: Pattern area 300~400mm: | |
| Pattern area 400~500mm: 4um | Pattern area 400~500mm: 2um | Pattern area 400~500mm: 50um | Pattern area 400~500mm: 4um | / | Pattern area 400~500mm: 50um | Pattern area 400~500mm: 50um | Pattern area 400~500mm: Pattern area 400~500mm: | |
| Pattern area 500~600mm: 5um | Pattern area 500~600mm: 3um | Pattern area 500~600mm: 60um | Pattern area 500~600mm: 5um | / | Pattern area 500~600mm: 60um | Pattern area 500~600mm: 60um | Pattern area 500~600mm: Pattern area 500~600mm: | |
| Feature Spacing Accuracy of Any 2 Feature Points (Accuracy Definition ➡Go Link) | Pattern area <=100mm: 2um | Pattern area <=100mm: 2um | Pattern area <=100mm: 20um | Pattern area <=100mm: 2um | Pattern area <=50mm: 4um | Pattern area <=100mm: 20um | Pattern area <=100mm: 20um | Pattern area Pattern area |
| Max. Overall Dimension | 1092 x 813mm | 1200 x 850mm | 2500 x 1580mm | 1200 x 850mm | 228 x 228mm | 2500 x 1580mm | 2500 x 1580mm | 2500 x 1580mm 2500 x 1580mm |
| Go Details | Go Details | Go Details | Go Details | Go Details | Go Details | Go Details | Go Details |